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Qnity Advances Semiconductor Materials Innovation with Next-Generation KLA Inspection Technology

Semiconductor materials innovation

Qnity Electronics, Inc., a technology solutions leader across the semiconductor value chain, is advancing semiconductor materials innovation with new inspection capabilities from KLA. The company has installed a Surfscan® SP7XP unpatterned wafer defect inspection system from KLA. The investment strengthens Qnity’s efforts to develop and manufacture materials for advanced semiconductor technologies.

The new inspection platform provides deeper process insight during materials development and manufacturing. It also supports the company’s efforts to meet evolving customer technology roadmaps. As semiconductor manufacturing moves toward smaller nodes, manufacturers need stronger process control and defect detection capabilities.

“Developing breakthrough materials for advanced semiconductor technologies requires deep insight into performance and quality at every stage of development and manufacturing,” said Julia Woertink, VP of Technology, Semiconductor Technologies, Qnity. “By strengthening how we understand and control quality, we can help our customers push into more advanced nodes with greater confidence and speed.”

Qnity Strengthens Advanced Semiconductor Manufacturing

Qnity installed the Surfscan SP7XP system at its New England Manufacturing & Technology Center in Marlborough, Mass. The installation forms part of the company’s wider investment strategy for advanced semiconductor materials innovation.

The system expands Qnity’s characterization and process control capabilities. As a result, development teams can identify process variation earlier. They can also investigate potential sources of variation during materials development and integration.

This capability becomes increasingly important as semiconductor manufacturers adopt advanced process technologies. At advanced nodes, even minor defects can influence device performance and manufacturing reliability. Therefore, detailed defect inspection can help teams improve process understanding.

The latest investment also supports Qnity’s semiconductor materials innovation efforts across advanced lithography applications. These materials include the Epic® photoresist family for ArF lithography. They also include the Eon™ photoresist family for extreme ultraviolet (EUV) lithography. In addition, Qnity develops enabling underlayer materials for advanced semiconductor applications. These materials support increasingly complex lithography processes used in semiconductor manufacturing.

KLA Inspection Supports Process Control

The Surfscan SP7XP system adds advanced wafer inspection capabilities to Qnity’s existing technology ecosystem. It helps teams examine unpatterned wafers and identify defects during development and manufacturing activities.

Consequently, Qnity can gain earlier visibility into product and process variation. This insight can support faster process learning and improve scale-up activities. It can also help customers move advanced materials from development toward reliable manufacturing.

Improved process control remains a major focus across the semiconductor industry. Manufacturers continue to pursue smaller geometries while managing tighter performance and quality requirements. Therefore, inspection and characterization technologies play an important role in advanced node development.

“Qnity’s investment in the Surfscan SP7XP system reflects the growing emphasis on characterization and process control across the semiconductor value chain,” said James Seale, General Manager, KLA. “Process qualification, monitoring and defect characterization are key enablers for the quality and reliability required in advanced semiconductor applications.”

Qnity’s latest investment further expands its capabilities for advanced Semiconductor materials innovation. It also strengthens the company’s ability to support customers working on next-generation semiconductor technologies.

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News Source: Businesswire.com